Protecting wafer surface during plasma ignition using an arsenic cap
| Author | |
|---|---|
| Year Published |
2005
|
| Journal |
J. Vac. Sci. Technol. B
|
| Volume |
23
|
| Number of Pages |
1324-1327
|
| Month Published |
05
|
| URL |
http://dx.doi.org/10.1116/1.1914820
|
| Download citation |