On the fabrication of three-dimensional silicon-on-insulator based optical phased array for agile and large angle laser beam steering systems
| Author | |
|---|---|
| Year Published |
2010
|
| Journal |
J. Vac. Sci. Technol. B
|
| Volume |
28
|
| Number of Pages |
C6O1-C6O7
|
| Month Published |
11
|
| URL |
http://dx.doi.org/10.1116/1.3511508
|
| Download citation |