Effects of different plasma species (atomic N, metastable N₂^*, and ions) on the optical properties of dilute nitride materials grown by plasma-assisted molecular-beam epitaxy

Author	Michael M. Oye Terry J. Mattord Gary A. Hallock Seth R. Bank Mark A. Wistey Jason M. Reifsnider Aaron J. Ptak Homan B. Yuen James S. Harris Archie L. Holmes Jr.
Year Published	2007
Journal	APL
Volume	91
Number of Pages	191903
Month Published	09
URL	http://dx.doi.org/10.1063/1.2806226
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Effects of different plasma species (atomic N, metastable N2*, and ions) on the optical properties of dilute nitride materials grown by plasma-assisted molecular-beam epitaxy