Nitrogen plasma optimization for high-quality dilute nitrides
| Author | |
|---|---|
| Year Published |
2005
|
| Journal |
J. Cryst. Growth
|
| Volume |
278
|
| Number of Pages |
229-233
|
| Month Published |
05
|
| URL |
http://dx.doi.org/10.1016/j.jcrysgro.2004.12.060
|
| Download citation |