Self-aligned III-V MOSFETs for sub-22nm Nodes

Author
Mark A. Wistey
Uttam Singisetti
G. J. Burek
Brian J. Thibeault
Joel Cagnon
Susanne Stemmer
Seth R. Bank
Yukun Sun
E. J. Kiewra
D. K. Sadana
Arthur C. Gossard
Mark J. Rodwell
Year of Publication
2008
Month Published
08
Conference Location
Austin, TX
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