Investigation of nitrogen flow variation into a radio frequency plasma cell on plasma properties and GaInNAs grown by molecular beam epitaxy
| Author | |
|---|---|
| Year Published |
2005
|
| Journal |
J. Vac. Sci. Technol. B
|
| Volume |
23
|
| Number of Pages |
1328-1332
|
| URL |
http://dx.doi.org/10.1116/1.1881592
|
| Download citation |