Height-selective etching for regrowth of self-aligned contacts using MBE
| Author | |
|---|---|
| Year Published |
2009
|
| Journal |
J. Cryst. Growth
|
| Volume |
311
|
| Number of Pages |
1984-1987
|
| Month Published |
03
|
| URL |
http://dx.doi.org/10.1016/j.jcrysgro.2008.11.012
|
| Download citation |