Publications
Journal Article
- M. M. Oye, S. R. Bank, A. J. Ptak, R. C. Reedy, M. S. Goorsky, and A. L. Holmes, "Role of ion damage on unintentional Ca incorporation during the plasma-assisted molecular-beam epitaxy growth of dilute nitrides using N2/Ar source gas mixtures," Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena, vol. 26, no. 3, pp. 1058–1063, Dec 2008.
